The Japan Society of Applied Physics

14:00 〜 14:15

[M-4-01] High Substitutional-Sn-Concentration GeSn-on-Insulator by Weak-Laser-Irradiation-Enhanced Solid-Phase Crystallization at Low-Temperature (~170°C)

T. Sugino1, K. Moto1, R. Matsumura1, H. Ikenoue1, M. Miyao1, T. Sadoh1 (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.M-4-01