2:15 PM - 2:30 PM

[O-1-03] Kinetics of Enhanced Oxide Growth on 4H-SiC in O₂ and H₂O Coexisting Ambient

K. Ishinoda¹,^○K. Kita¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2017.O-1-03