2:30 PM - 2:45 PM

[O-1-04] Oxidation-induced Lattice Distortion at 4H-SiC (0001) Surface Characterized by Surface Sensitive In-plane X-ray Diffractometry

^○A. D. Hatmanto¹, K. Kita¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2017.O-1-04