[PS-1-04] Oxidation Enhancement Characteristics of SrTi_xMg_1-xO_3-δ Catalyst for Low Temperature Gate Oxide Formation

^○H. F. Sun¹, A. Ikeda¹, T. Asano¹ (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-1-04