The Japan Society of Applied Physics

[PS-10-03] Oxygen plasma treatment for wettability improvement of alkyl terminal self-assembled monolayer as gate dielectrics

K. Kuribara1, Y. Tanaka2, T. Nobeshima1, T. Kazasa1, M. Yoshida1 (1.AIST (Japan), 2.Ube Industries, Ltd. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-10-03