The Japan Society of Applied Physics

[PS-11-11] Improvement of spatial resolution for 2D chemical images in thin-Si substrate

Y. -P. Chen1, W. -Y. Zeng1, T. -C. Chen1, C. -M. Yang1,2, C. -S. Lai1 (1.Chang Gung Univ. (Taiwan), 2.Chang Gung Memorial Hospital (Taiwan))

https://doi.org/10.7567/SSDM.2017.PS-11-11