The Japan Society of Applied Physics

[PS-13-04] Impact of Crystallinity of AlN Thermal Conductive Film on Thermoelectric Power of Silicon Nanowire Micro Thermoelectric Generator

R. Yamato1, S. Hashimoto1, T. Zhan1, S. Oba1, Y. Himeda1, T. Matsukawa2, T. Watanabe1 (1.Waseda Univ. (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.PS-13-04