[PS-14-01] Observations of Inhomogeneity of 3C-SiC Layers Grown on 6H-SiC Substrates Using Scanning Internal Photoemission Microscopy

^○K. Shiojima¹, N. Mishina¹, N. Ichikawa², M. Kato² (1.Univ. of Fukui (Japan), 2.Nagoya Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-14-01