[PS-3-15 (Late News)] Multi-V_T with Metal Gate Work-function Modulation by PLAD Implants for Ge FinFET Applications

^○S. D. Kothari¹, H. Nejad², N. Variam², S. Lodha¹ (1.Indian Inst. of Tech. Bombay (India), 2.Applied Materials Inc. (USA))

https://doi.org/10.7567/SSDM.2017.PS-3-15