[PS-4-02] Non-Destructive Observation of Chemical State in ReRAM by Laser-excited Photoemission Electron Microscopy

^○J. Kawakita^1,2, H. Shima^2,3, Y. Naitoh^2,3, H. Akinaga^2,3, T. Taniuchi^1,2, S. Shin^1,2 (1.Univ. of Tokyo (Japan), 2.AIST-UTokyo Advanced Operando-Measurement Tech. Open Innovation Lab. (OPERANDO-OIL) (Japan), 3.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.PS-4-02