[PS-4-07] Experimental Investigation of Localized Stress Induced Leakage Current Distribution in Gate Dielectrics Using Array Test Circuit

^○H. Park¹, T. Suwa¹, R. Kuroda¹, A. Teramoto¹, S. Sugawa¹ (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-4-07