The Japan Society of Applied Physics

[PS-4-07] Experimental Investigation of Localized Stress Induced Leakage Current Distribution in Gate Dielectrics Using Array Test Circuit

H. Park1, T. Suwa1, R. Kuroda1, A. Teramoto1, S. Sugawa1 (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-4-07