[PS-4-08] Impact of Mechanical Stress to Cell Characteristics in Vertically Stacked NAND Flash Structure

^○Y. Oh¹, T. Ono², Y. Song¹ (1.Hanyang Univ. (Korea), 2.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-4-08