The Japan Society of Applied Physics

[PS-6-13] Defect Observations of Ni/AlGaN/GaN Schottky Contacts on Si Substrates Using Scanning Internal Photoemission Microscopy

K. Shiojima1, H. Konishi1, H. Imadate1, Y. Yamaoka2,3, K. Matsumoto2, T. Egawa3 (1.Univ. of Fukui (Japan), 2.Taiyo Nippon Sanso Corp. (Japan), 3.Nagoya Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-6-13