[PS-6-14] In-Situ Mapping of Degradation of AlGaN/GaN MIS-HEMTs Using Video-Mode Scanning Internal Photoemission Microscopy

^○K. Shiojima¹, S. Murase¹, Y. Watamura², T. Suemitsu² (1.Univ. of Fukui (Japan), 2.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-6-14