Epitaxial Growth of Non-polar ZnS on Sapphire Substrate by Mist Chemical Vapor Deposition

K. Okita

doi:https://doi.org/10.7567/SSDM.2017.PS-8-08

[PS-8-08] Epitaxial Growth of Non-polar ZnS on Sapphire Substrate by Mist Chemical Vapor Deposition

^○K. Okita¹, T. Goto¹, Y. Tanaka¹, M. Takenouchi¹, Z. Yatabe², Y. Nakamura^1,3 (1.Kumamoto Univ. GSST (Japan), 2.Kumamoto Univ. POIE (Japan), 3.Phoenics (Japan))

https://doi.org/10.7567/SSDM.2017.PS-8-08

2017 International Conference on Solid State Devices and Materials

[PS-8-08] Epitaxial Growth of Non-polar ZnS on Sapphire Substrate by Mist Chemical Vapor Deposition