Study on Fabrication of Yttrium Oxide Thin Films Using Mist CVD

L. Liu

doi:https://doi.org/10.7567/SSDM.2017.PS-8-09

2017 International Conference on Solid State Devices and Materials

2017年9月19日〜 2017年9月22日
Sendai International Center

[PS-8-09] Study on Fabrication of Yttrium Oxide Thin Films Using Mist CVD

^○L. Liu¹, M. Nishi¹, S. Sato¹, P. Rutthongjan¹, M. Sakamoto¹, Y. Kobayashi¹, G. T. Dang¹, E. K. C. Pradeep¹, T. Kawaharamura¹ (1.Kochi Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2017.PS-8-09

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