The Japan Society of Applied Physics

[PS-8-11] Electronic states in the neutral-beam-formed Ta2O5 film measured by thermally stimulated current method

T. Ohno1,2, H. Shima3, H. Akinaga3, S. Samukawa1 (1.Tohoku Univ. (Japan), 2.PRESTO-JST (Japan), 3.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.PS-8-11