[PS-8-11] Electronic states in the neutral-beam-formed Ta₂O₅ film measured by thermally stimulated current method

^○T. Ohno^1,2, H. Shima³, H. Akinaga³, S. Samukawa¹ (1.Tohoku Univ. (Japan), 2.PRESTO-JST (Japan), 3.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.PS-8-11