Oxygen plasma treatment for wettability improvement of alkyl terminal self-assembled monolayer as gate dielectrics

2017 International Conference on Solid State Devices and Materials

Sep 19, 2017 - Sep 22, 2017
Sendai International Center

11:39 AM - 11:41 AM

^○K. Kuribara¹, Y. Tanaka², T. Nobeshima¹, T. Kazasa¹, M. Yoshida¹ (1.AIST (Japan), 2.Ube Industries, Ltd. (Japan))