11:39 〜 11:41 [PS-10-03] Oxygen plasma treatment for wettability improvement of alkyl terminal self-assembled monolayer as gate dielectrics ○K. Kuribara1, Y. Tanaka2, T. Nobeshima1, T. Kazasa1, M. Yoshida1 (1.AIST (Japan), 2.Ube Industries, Ltd. (Japan))
