The Japan Society of Applied Physics

11:39 AM - 11:41 AM

[PS-13-03] Fabrication of Gate-All-Around Poly-Si Tube-channel Junctionless Field-Effect Transistors

Y. -T. Chang1, K. -P. Peng1, P. -W. Li1, H. -C. Lin1 (1.National Chiao Tung Univ. (Taiwan))