11:35 AM - 11:37 AM
[PS-14-01] Observations of Inhomogeneity of 3C-SiC Layers Grown on 6H-SiC Substrates Using Scanning Internal Photoemission Microscopy
○K. Shiojima1, N. Mishina1, N. Ichikawa2, M. Kato2
(1.Univ. of Fukui (Japan), 2.Nagoya Inst. of Tech. (Japan))