2017 International Conference on Solid State Devices and Materials

Sep 19, 2017 - Sep 22, 2017
Sendai International Center

11:39 AM - 11:41 AM

[PS-2-03] Fatigue Testing of Poly-SiGe Film Using Microresonator

^○A. Uesugi¹, T. Namazu¹ (1.Aichi Inst. of Tech. (Japan))

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