Ge-cap Quantum Well Bulk FinFET for 5nm node CMOS Integration

E. D. Kurniawan

11:57 AM - 11:59 AM

[PS-3-12] Ge-cap Quantum Well Bulk FinFET for 5nm node CMOS Integration

^○E. D. Kurniawan^1,2, S. -Y. Yang¹, Y. -Y. Yang¹, K. -H. Peng¹, V. Thirunavukkarasu^1,2, Y. -H. Lin³, Y. -C. Wu¹ (1.National Tsing Hua Univ. (Taiwan), 2.Academia Sinica (Taiwan), 3.National United Univ. (Taiwan))

2017 International Conference on Solid State Devices and Materials

[PS-3-12] Ge-cap Quantum Well Bulk FinFET for 5nm node CMOS Integration