The Japan Society of Applied Physics

763 results (171 - 180)

[H-1-02] Moisture Barrier Properties of Single-Layer Graphene Deposited on Cu Films for Cu Metallization

P. Gomasang1, T. Abe1, K. Kawahara2, Y. Wasai3, N. Nabatova-Gabain3, N. T. Cuong4, H. Ago2, S. Okada5, K. Ueno1,6 (1.Shibaura Inst. of Tech. (Japan), 2.Kyushu Univ. (Japan), 3.Horiba Ltd. (Japan), 4.NIMS (Japan), 5.Univ. of Tsukuba (Japan), 6.SIT Res. Center for Green Innov. (Japan))

2017 International Conference on Solid State Devices and Materials |Wed. Sep 20, 2017 2:00 PM - 2:15 PM |PDF Download

763 results (171 - 180)