16:00 〜 16:15

[B-6-03] Low-Resistive, Highly-Reflowable Aluminum Contact Plug with Co Wetting Film

^○K. Omori¹, M. Inoue¹, T. Maruyama¹, M. Matsuura¹ (1.Renesas Electronics Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.B-6-03