09:30 〜 09:45

[B-7-02] Effect of String Tapering on Threshold Voltage Distribution and Its Mitigation in a Vertical Channel 3D NAND Flash Memory

U.M. Bhatt¹, A. Kumar², M. Pakala²,^○ S.K. Manhas¹ (1.Indian Inst. of Tech. (IIT), Roorkee (India), 2.Applied Materials Inc. (USA))

https://doi.org/10.7567/SSDM.2018.B-7-02