Experimental NBTI Investigation for 14 nm FinFETs Utilizing Sub-1 ns Fast V<sub>th</sub> Measurement (FVM) Technique

X. Yu

doi:https://doi.org/10.7567/SSDM.2018.C-2-02

15:45 〜 16:00

[C-2-02] Experimental NBTI Investigation for 14 nm FinFETs Utilizing Sub-1 ns Fast V_th Measurement (FVM) Technique

^○X. Yu^1,2,R. Cheng¹, W. Liu¹, Y. Qu¹, J. Han¹, J. Lu³, B. Chen¹, Y. Zhao¹ (1.Zhejiang University (China), 2.Zhejiang Lab (China), 3.Hunan University (China))

https://doi.org/10.7567/SSDM.2018.C-2-02

2018 International Conference on Solid State Devices and Materials

[C-2-02] Experimental NBTI Investigation for 14 nm FinFETs Utilizing Sub-1 ns Fast Vth Measurement (FVM) Technique

[C-2-02] Experimental NBTI Investigation for 14 nm FinFETs Utilizing Sub-1 ns Fast V_th Measurement (FVM) Technique