The Japan Society of Applied Physics

15:45 〜 16:00

[C-2-02] Experimental NBTI Investigation for 14 nm FinFETs Utilizing Sub-1 ns Fast Vth Measurement (FVM) Technique

X. Yu1,2,R. Cheng1, W. Liu1, Y. Qu1, J. Han1, J. Lu3, B. Chen1, Y. Zhao1 (1.Zhejiang University (China), 2.Zhejiang Lab (China), 3.Hunan University (China))

https://doi.org/10.7567/SSDM.2018.C-2-02