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[D-2-02] Recovery of Local Lattice Distortion at the Surface of Thermally-Oxidized 4H-SiC (0001) by Post-Oxidation Annealing

^○A.D. Hatmanto¹, K. Kita¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2018.D-2-02