2018 International Conference on Solid State Devices and Materials
Sep 9, 2018 - Sep 13, 2018 University of Tokyo
10:00 AM - 10:15 AM
[E-3-04] Evaluation of Electron Traps in SiN by Discharging Current Transient Spectroscopy: Verification of Validity by Comparing with Conventional DLTS
○H. Seki1, Y. Mitani1 (1.Toshiba Memory Corp. (Japan))
