The Japan Society of Applied Physics

15:45 〜 16:00

[E-6-03] Enhanced Growth of High Sn Concentration (Sn>=10%) GeSn on Insulator by Low Temperature (~170°C) Solid-Phase Crystallization Combined with Weak Laser Irradiation

T. Sadoh1, T. Sugino1, K. Moto1, R. Matsumura1, H. Ikenoue1, M. Miyao1 (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.E-6-03