The Japan Society of Applied Physics

10:00 AM - 10:15 AM

[E-7-03] Molecular beam epitaxial growth and characterization of coherent α-Al2O3/Ga2O3 superlattices on r-plane sapphire

Y. Kato1, M. Imura2, Y. Nakayama2, M. Takeguchi2, E. Kobayashi3, K. Takahashi4, T. Oshima1 (1.Electrical and Electronic Engineering, Saga Univ. (Japan), 2.National Institute for Materials Science (Japan), 3.Kyushu Synchrotron Light Research Center (Japan), 4.Synchrotron Light Application Center, Saga Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.E-7-03