13:30 〜 13:45

[F-5-01] Quantitative Analysis of Low-level Carbon in Si Using Room-Temperature Photoluminescence after Electron Irradiation

^○Y. Ishikawa¹, M. Tajima¹, A. Ogura¹ (1.Meiji University (Japan))

https://doi.org/10.7567/SSDM.2018.F-5-01