The Japan Society of Applied Physics

14:45 〜 15:00

[G-1-03] Temperature and Humidity Accelerations to Establish Lifetime Prediction Model for Cu-based Metallization

P. Gomasang1, S. Ogiue1, S. Yokogawa2, K. Ueno1,3 (1.Shibaura Inst. of Tech. (Japan), 2.The Univ. of Electro-communication (Japan), 3.SIT Res. Ctr. for Green Innov. (Japan))

https://doi.org/10.7567/SSDM.2018.G-1-03