10:45 〜 11:15

[G-4-01 (Invited)] Low Temperature and Non-Vacuum Surface Modification for Robust Hybrid Bonding

^○A. Shigetou¹, T.H.-W. Yang², R. Kao¹ (1.NIMS (Japan), 2.National Taiwan Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.G-4-01