11:30 〜 11:45

[G-4-03 (Late News)] X-ray Computed Tomography Studies on DSA Formed Vertical Nanocylinders Containing Metals for 3D-LSI Applications - Characterization Technique Dependent Reliability Issues

^○M. Mariappan¹, A. Takeuchi², T. Fukushima¹, M. Koyanagi¹ (1.Tohoku University (Japan), 2.JASRI (Japan))

https://doi.org/10.7567/SSDM.2018.G-4-04