15:45 〜 16:00

[G-6-02] Control of Cu(111) orientation on TaWN alloy barrier

^○M.B. Takeyama¹, M. Sato¹, M. Yasuda² (1.Kitami Inst. of Tech. (Japan), 2.Toray Res. Center, Inc. (Japan))

https://doi.org/10.7567/SSDM.2018.G-6-02