16:00 〜 16:15

[G-6-03] Cu-Resistivity and Intrinsic EM-Reliability Study in Ta/Cu, Co/Cu and Ru/Cu Systems for Advanced BEOL Cu-Interconnections

^○N. Jourdan¹, O. Varela Pedreira¹, M. Van der Veen¹, C. Adelmann¹, S. Van Elshocht¹, Z. Tokei¹ (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2018.G-6-03