The Japan Society of Applied Physics

14:30 〜 14:45

[H-1-02] Strain Management in Germanium-On-Insulator (GeOI) Substrates for Photonic Applications

J. Widiez1, M. Bertrand1, C. Morales1, M. Cordeau1, P. Gergaud1, A. Grenier1, J.-M. Hartmann1, I. Degirmencioglu1, A. Chelnokov1, V. Reboud1 (1.CEA LETI (France))

https://doi.org/10.7567/SSDM.2018.H-1-02