Strain Management in Germanium-On-Insulator (GeOI) Substrates for Photonic Applications

J. Widiez

doi:https://doi.org/10.7567/SSDM.2018.H-1-02

14:30 〜 14:45

[H-1-02] Strain Management in Germanium-On-Insulator (GeOI) Substrates for Photonic Applications

^○J. Widiez¹, M. Bertrand¹, C. Morales¹, M. Cordeau¹, P. Gergaud¹, A. Grenier¹, J.-M. Hartmann¹, I. Degirmencioglu¹, A. Chelnokov¹, V. Reboud¹ (1.CEA LETI (France))

https://doi.org/10.7567/SSDM.2018.H-1-02

2018 International Conference on Solid State Devices and Materials

[H-1-02] Strain Management in Germanium-On-Insulator (GeOI) Substrates for Photonic Applications