Si<sub>3</sub>N<sub>4</sub>-based optical frequency comb generation featuring front-end CMOS- and Si-photonics process compatibility

H. El Dirani

doi:https://doi.org/10.7567/SSDM.2018.H-4-01

10:45 〜 11:00

[H-4-01] Si₃N₄-based optical frequency comb generation featuring front-end CMOS- and Si-photonics process compatibility

^○H. El Dirani¹, A. Kamel², M. Casale¹, S. Kerdiles¹, C. Monat³, X. Letartre³, M. Pu², L.K. Oxenløwe², K. Yvind², C. Sciancalepore¹ (1.CEA-Leti (France), 2.DTU Fotonik, Technical University of Denmark (Denmark), 3.Institut des Nanotechnologies de Lyon, (France))

https://doi.org/10.7567/SSDM.2018.H-4-01

2018 International Conference on Solid State Devices and Materials

[H-4-01] Si3N4-based optical frequency comb generation featuring front-end CMOS- and Si-photonics process compatibility

[H-4-01] Si₃N₄-based optical frequency comb generation featuring front-end CMOS- and Si-photonics process compatibility