Ring Resonator Designed for Biosensing Applications Manufactured on 300 mm SOI in an Industrial Environment

M. Calvo

doi:https://doi.org/10.7567/SSDM.2018.H-4-03

11:15 AM - 11:30 AM

[H-4-03] Ring Resonator Designed for Biosensing Applications Manufactured on 300 mm SOI in an Industrial Environment

^○M. Calvo^1,2,3,4, S. Guerber⁴, G. Beaudin^1,2, M. Canva^1,2, P. Rojo-Romeo^1,2,3, C. Baudot⁴, F. Boeuf⁴, R. Orobtchouk³, P. Charette^1,2, S. Monfray⁴ (1.Lab. Nanotechnologies et Nanosystèmes, Univ. of Sherbrooke (Canada), 2.Inst. interdisciplinaire d'Innovation Technologique, Univ. of Sherbrooke (Canada), 3.Inst. des Nanotechnologies de Lyon (France), 4.STMicroelectronics (France))

https://doi.org/10.7567/SSDM.2018.H-4-03

2018 International Conference on Solid State Devices and Materials

[H-4-03] Ring Resonator Designed for Biosensing Applications Manufactured on 300 mm SOI in an Industrial Environment