Nonlinear properties of ultra-low losses hydrogen-annealed submicron silicon waveguides

H. El Dirani

doi:https://doi.org/10.7567/SSDM.2018.H-4-04

11:30 〜 11:45

[H-4-04] Nonlinear properties of ultra-low losses hydrogen-annealed submicron silicon waveguides

H. El Dirani¹, C. Bellegarde³, C. Petit-Etienne³, C. Monat⁴, J.-M. Hartmann², E. Pargon³,^○C. Sciancalepore¹ (1.CEA-Leti, Optics and Photonics Divisions (France), 2.CEA-Leti, Silicon Technologies Division (France), 3.LTM, Centre National de la Recherche Scientifique (France), 4.Institut des Nanotechnologies de Lyon, (France))

https://doi.org/10.7567/SSDM.2018.H-4-04

2018 International Conference on Solid State Devices and Materials

[H-4-04] Nonlinear properties of ultra-low losses hydrogen-annealed submicron silicon waveguides