Excimer Laser Doping of LTPS Thin Films for Printable Device Fabrication

N. Tanaka

doi:https://doi.org/10.7567/SSDM.2018.N-2-01

3:30 PM - 3:45 PM

[N-2-01] Excimer Laser Doping of LTPS Thin Films for Printable Device Fabrication

^○N. Tanaka¹, K. Imokawa^1,2, A. Suwa^1,2, D. Nakamura¹, T. Sadoh¹, H. Ikenoue^1,2 (1.Grad. Sch. of ISEE, Kyushu Univ. (Japan), 2.Dept. of Gigaphoton Next GLP, Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.N-2-01

2018 International Conference on Solid State Devices and Materials

[N-2-01] Excimer Laser Doping of LTPS Thin Films for Printable Device Fabrication