2:30 PM - 2:45 PM

[N-8-02] Electrical properties of large-grained SiGe on an insulator formed by advanced solid-phase crystallization

^○D. Takahara¹, T. Suemasu¹, K. Toko¹ (1.University of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2018.N-8-02