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[N-8-04] Ultra-High-Speed Crystallization of Amorphous Silicon Films on Flexible Glass Substrate by Thermal-Plasma-Jet Irradiation Using Cylindrical Rotation Stage

^○W. Nakano¹, H. Hanafusa¹, S. Higashi¹ (1.Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.N-8-04