The Japan Society of Applied Physics

11:00 〜 13:30

[PS-1-01] Grain-Boundary-Limited Polycrystalline-Silicon Mobility with Negative Temperature Dependence ~ Modeling of Carrier Conduction through Grain-Boundary Traps Based on Trap-Assisted Tunneling ~

M. Hogyoku1, T. Izumida1, H. Tanimoto1, N. Aoki1, S. Onoue1 (1.Toshiba Memory Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-1-01