First-Principles Study on Shape Degradation during Oxidation Process for Three-Dimensional Structure Devices

Y. Yajima

doi:https://doi.org/10.7567/SSDM.2018.PS-1-04

11:00 AM - 1:30 PM

[PS-1-04] First-Principles Study on Shape Degradation during Oxidation Process for Three-Dimensional Structure Devices

^○Y. Yajima¹, K. Shiraishi^2,4, T. Endoh^3,4, H. Kageshima^1,4 (1.Shimane Univ. (Japan), 2.Nagoya Univ. (Japan), 3.Tohoku Univ. (Japan), 4.JST-ACCEL (Japan))

https://doi.org/10.7567/SSDM.2018.PS-1-04

2018 International Conference on Solid State Devices and Materials

[PS-1-04] First-Principles Study on Shape Degradation during Oxidation Process for Three-Dimensional Structure Devices